Particle Analysis in Material Science Applications
CMP Slurry Analysis - Contamination Detection
Task: Measure the concentration of contamination within CMP slurry.
Sample: Two silica CMP slurries, one newly produced and one recycled.
Run Conditions: Samples were diluted with DI water, and analyzed at 5X magnification. Particle size, shape, and concentration were measured.
Analysis: The recycled silica slurry was found to contain over twice the concentration of particulate >1µm, and was more irregular in shape.
